Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10332759 | Processing apparatus | — | 2019-06-25 |
| 9947571 | Processing apparatus, nozzle, and dicing apparatus | — | 2018-04-17 |
| 9679976 | Semiconductor device and method of manufacturing the same | — | 2017-06-13 |
| 9633903 | Device manufacturing method of processing cut portions of semiconductor substrate using carbon dioxide particles | — | 2017-04-25 |
| 9627259 | Device manufacturing method and device | — | 2017-04-18 |
| 9437695 | Semiconductor device and method of manufacturing the same | — | 2016-09-06 |
| 9263534 | Semiconductor device and method of manufacturing the same | — | 2016-02-16 |