Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9566620 | Semiconductor manufacturing apparatus and method for cleaning same | Kenichiro Toratani, Fumiki Aiso, Takashi Nakao | 2017-02-14 |
| 8187973 | Method for manufacturing semiconductor device and the semiconductor device | Katsuyuki Sekine | 2012-05-29 |