Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4510173 | Method for forming flattened film | Tsunetoshi Arikado | 1985-04-09 |
| 4473437 | Dry etching method for organic material layers | Tsunetoshi Arikado | 1984-09-25 |
| 4264715 | Method of preparing resist pattern | Akira Miura, Shozo Hideyama | 1981-04-28 |