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Laser processing apparatus and laser processing method |
Satoshi Ando, Tomobumi Muraoka, Akira Matsuno, Tadashi Kurata |
2013-03-05 |
| 7943534 |
Semiconductor device manufacturing method and semiconductor device manufacturing system |
Akira Matsuno |
2011-05-17 |
| 5670207 |
Forming a thin-film EL element |
Atsushi Miyakoshi |
1997-09-23 |
| 5641582 |
Thin-film EL element |
Atsushi Miyakoshi |
1997-06-24 |
| 5542979 |
Apparatus for producing thin film |
Akira Matsuno |
1996-08-06 |
| 5466494 |
Method for producing thin film |
Akira Matsuno |
1995-11-14 |
| 5311035 |
Thin film electroluminescence element |
— |
1994-05-10 |
| 5300316 |
Method of forming thin oxysulfide film |
Koutoku Ohmi |
1994-04-05 |
| 5289171 |
Color display apparatus |
Takehito Watanabe, Satoshi Tanda |
1994-02-22 |
| 5164225 |
Method of fabricating thin-film EL device |
Satoshi Tanda |
1992-11-17 |
| 5133988 |
Method of manufacturing thin film EL device |
Takehito Watanabe |
1992-07-28 |
| 5072263 |
Thin film EL device with protective film |
Takehito Watanabe, Satoshi Tanda |
1991-12-10 |
| 5006365 |
Method of manufacturing a thin film EL device by multisource deposition method |
Takehito Watanabe |
1991-04-09 |
| 4794302 |
Thin film el device and method of manufacturing the same |
Takehito Watanabe |
1988-12-27 |