Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9239265 | Apparatus and method for real time measurement of substrate temperatures for use in semiconductor growth and wafer processing | Charles A. Taylor, Douglas A. Perry, Roy Clarke, Jason Williams | 2016-01-19 |
| 9030652 | Non-contact, optical sensor for synchronizing to free rotating sample platens with asymmetry | Scott Hines, Charles A. Taylor, Greg DeMaggio | 2015-05-12 |
| 8786841 | Thin film temperature measurement using optical absorption edge wavelength | Charles A. Taylor, Barry D. Wissman | 2014-07-22 |
| 8282273 | Blackbody fitting for temperature determination | Barry D. Wissman, Charles A. Taylor | 2012-10-09 |
| 7837383 | Apparatus and method for real time measurement of substrate temperatures for use in semiconductor growth and wafer processing | Charles A. Taylor, Douglas A. Perry, Roy Clarke, Jason Williams | 2010-11-23 |
| 7391523 | Curvature/tilt metrology tool with closed loop feedback control | Charles A. Taylor, Douglas A. Perry, Roy Clarke | 2008-06-24 |