Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7862659 | Semiconductor manufacturing device | Jae-Ho Byun | 2011-01-04 |
| 6845732 | Gas heating apparatus for chemical vapor deposition process and semiconductor device fabrication method using same | — | 2005-01-25 |