Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8132996 | Gate valve and substrate-treating apparatus including the same | — | 2012-03-13 |
| 7845892 | Movable transfer chamber and substrate-treating apparatus including the same | — | 2010-12-07 |
| 7771150 | Gate valve and substrate-treating apparatus including the same | — | 2010-08-10 |
| 4783050 | Magnetic valve for liquid and gaseous media | — | 1988-11-08 |
| 4574841 | Rocker lever solenoid valve | — | 1986-03-11 |
| 4561632 | Solenoid valve | — | 1985-12-31 |