Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8889470 | Thin film type solar cell and method for manufacturing the same | Jae-Ho Kim | 2014-11-18 |
| 7391098 | Semiconductor substrate, semiconductor device and method of manufacturing the same | — | 2008-06-24 |
| 6872421 | Atomic layer deposition method | Kyung-Sik Shim | 2005-03-29 |
| 6769629 | Gas injector adapted for ALD process | Jong-Man Park | 2004-08-03 |
| 6656284 | Semiconductor device manufacturing apparatus having rotatable gas injector and thin film deposition method using the same | Kyung-Sik Shim, Chang-Soo Park | 2003-12-02 |
| 6634314 | Atomic layer deposition method and semiconductor device fabricating apparatus having rotatable gas injectors | Kyung-Sik Shim | 2003-10-21 |
| 6565655 | High vacuum apparatus for fabricating semiconductor device and method for forming epitaxial layer using the same | Sung-Ryul Kim, Jae-Kyun Park | 2003-05-20 |
| 6530993 | Cluster tool for fabricating semiconductor device | Sung-Weon Lee | 2003-03-11 |
| 6524430 | Apparatus for fabricating a semiconductor device | Kyung-Sik Shim | 2003-02-25 |
| 6514837 | High density plasma chemical vapor deposition apparatus and gap filling method using the same | Young Suk Lee | 2003-02-04 |
| 6435197 | Method of cleaning a semiconductor fabricating apparatus | Yong Woo Shin | 2002-08-20 |
| 6383953 | Apparatus for fabricating semiconductor device and method for fabricating semiconductor using the same | — | 2002-05-07 |
| 6338995 | High-permittivity dielectric capacitor for a semiconductor device and method for fabricating the same | Ki Bum Kim | 2002-01-15 |
| 6190460 | Apparatus for low pressure chemical vapor depostion | — | 2001-02-20 |
| 6180542 | Method for forming a high-permittivity dielectric film use in a semiconductor device | — | 2001-01-30 |
| 6124218 | Method for cleaning wafer surface and a method for forming thin oxide layers | — | 2000-09-26 |
| 6026764 | Apparatus for low pressure chemical vapor deposition | — | 2000-02-22 |
| 6009831 | Apparatus for low pressure chemical vapor deposition | — | 2000-01-04 |
| 5928427 | Apparatus for low pressure chemical vapor deposition | — | 1999-07-27 |
| 5441570 | Apparatus for low pressure chemical vapor deposition | — | 1995-08-15 |