CN

Chang Kil NAM

JC Jusung Engineering Co.: 2 patents #60 of 220Top 30%
Overall (All Time): #2,067,478 of 4,157,543Top 50%
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Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
8445988 Apparatus and method for plasma processing 2013-05-21
8388757 Electrostatic chuck and apparatus for treating substrate including the same 2013-03-05