Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6723595 | Thin film deposition method including using atomic layer deposition without purging between introducing the gaseous reactants | — | 2004-04-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6723595 | Thin film deposition method including using atomic layer deposition without purging between introducing the gaseous reactants | — | 2004-04-20 |