Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12065734 | Chamber cleaning device and chamber cleaning method | Dong Hwan Lee, Jae-Ho Kim, Hyun I. Kim, Ho Jin Yun, Jae Wan Lee | 2024-08-20 |
| 11427906 | Chamber cleaning device and chamber cleaning method | Dong Hwan Lee, Jae-Ho Kim, Hyun I. Kim, Ho Jin Yun, Jae Wan Lee | 2022-08-30 |