Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10233542 | Apparatus for treating substrate and method for treating substrate | Jae Chan KWAK, Sung Kyu Kang, Hun JUNG | 2019-03-19 |
| 7435445 | Method for manufacturing semiconductor device | Cheol Shin, Sang Sim, Jung Soo Kim, Won-hyung Lee, Dae-sik Kim | 2008-10-14 |
| 7077904 | Method for atomic layer deposition (ALD) of silicon oxide film | Yong-Il Kim, Cheol Shin, Won-hyung Lee, Jung Soo Kim, Sang Sim | 2006-07-18 |