Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136548 | Laser annealing apparatus, laser annealing method, and method for manufacturing semiconductor device | Kenichi Ohmori, Ryosuke Sato, Nobuo Oku | 2024-11-05 |
| 11992896 | Laser irradiation apparatus, laser irradiation method, and semiconductor device manufacturing method | Kenichi Ohmori | 2024-05-28 |
| 11938563 | Annealed workpiece manufacturing method, laser anneal base stage, and laser anneal processing apparatus | — | 2024-03-26 |
| 11894229 | Laser annealing apparatus, laser annealing method, and method for manufacturing semiconductor device | Kenichi Ohmori, Ryosuke Sato, Nobuo Oku | 2024-02-06 |
| 11842898 | Method for manufacturing panel using a glass substrate as the laser light transmitting member and laser processing apparatus | Masashi Machida | 2023-12-12 |
| 11810799 | Laser processing apparatus and laser processing method | Masashi Machida | 2023-11-07 |
| 11187953 | Laser processing apparatus, semiconductor device manufacturing method, and amorphous silicon crystallization method | Masashi Machida | 2021-11-30 |
| 11114300 | Laser annealing apparatus, inspection method of substrate with crystallized film, and manufacturing method of semiconductor device | Kenichi Ohmori, Ryosuke Sato, Masashi Machida | 2021-09-07 |
| 9245757 | Laser annealing treatment apparatus and laser annealing treatment method | Junichi Shida, Masashi Machida | 2016-01-26 |
| 7680163 | Laser irradiating method including maintaining temperature of a lens | Junichi Shida, Shuichi Uryu | 2010-03-16 |
| 7471712 | Laser irradiating method and device for same | Junichi Shida, Shuichi Uryu | 2008-12-30 |