Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12011777 | Laser processing apparatus, laser processing method, and method for manufacturing semiconductor device | Yoshihiro Yamaguchi, Miki Sawai, Sadao Tanigawa, Naoyuki Kobayashi | 2024-06-18 |
| 11684999 | Laser irradiation apparatus | Atsushi Yamamoto, Daisuke Ito | 2023-06-27 |
| 11264259 | Workpiece conveyance apparatus, semiconductor manufacturing apparatus, and workpiece conveyance method | Ryo Shimizu, Miki Sawai, Daisuke Ito | 2022-03-01 |