Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9817311 | Resist pattern-forming method, substrate-processing method, and photoresist composition | Yuichiro Katsura, Ryu Matsumoto, Motoyuki Shima, Yuji Yada | 2017-11-14 |
| 9417527 | Resist pattern-forming method, substrate-processing method, and photoresist composition | Yuichiro Katsura, Ryu Matsumoto, Motoyuki Shima, Yuji Yada | 2016-08-16 |