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Apparatus for producing solid product |
Shuuichi Honda, Toru Tanaka |
2014-02-25 |
| 8658118 |
High purity crystalline silicon, high purity silicon tetrachloride for processes for producing the same |
Wataru Kato |
2014-02-25 |
| 8287645 |
Production process for high purity polycrystal silicon and production apparatus for the same |
Shuichi Honda, Minoru Yasueda, Masatsugu Yamaguchi, Toru Tanaka |
2012-10-16 |
| 8273316 |
Method for purification of silicon tetrachloride |
Harumichi Semoto |
2012-09-25 |
| 7922814 |
Production process for high purity polycrystal silicon and production apparatus for the same |
Shuichi Honda, Minoru Yasueda, Masatsugu Yamaguchi, Toru Tanaka |
2011-04-12 |
| 7815884 |
Method for producing polycrystalline silicon |
— |
2010-10-19 |
| 7553468 |
Method for producing solid product |
Shuuichi Honda, Toru Tanaka |
2009-06-30 |