Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12243713 | Anti-breakdown ion source discharge apparatus | Yaoyao Zhang, Dongdong HU, Jun Zhang, Na Li, Haiyang Liu +2 more | 2025-03-04 |
| 12009188 | Rotatable faraday cleaning apparatus and plasma processing system | Haiyang Liu, Dongdong HU, Xiaobo Liu, Na Li, Shiran CHENG +2 more | 2024-06-11 |
| 11955323 | Device for blocking plasma backflow in process chamber to protect air inlet structure | Na Li, Dongdong HU, Xiaobo Liu, Haiyang Liu, Shiran CHENG +2 more | 2024-04-09 |
| 11837439 | Inductively coupled plasma treatment system | Haiyang Liu, Xiaobo Liu, Xuedong Li, Na Li, Shiran CHENG +2 more | 2023-12-05 |
| 11735400 | Faraday cleaning device and plasma processing system | Haiyang Liu, Dongdong HU, Xiaobo Liu, Na Li, Shiran CHENG +2 more | 2023-08-22 |