Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12217983 | Substrate processing apparatus | Atsuo Kimura | 2025-02-04 |
| 10615059 | Substrate processing device | Atsuo Kimura | 2020-04-07 |
| 10186436 | Substrate processing system and substrate processing method | Atsuo Kimura | 2019-01-22 |