TK

Tadashi Komagata

JE Jeol: 3 patents #122 of 669Top 20%
Overall (All Time): #1,258,801 of 4,157,543Top 35%
4
Patents All Time

Issued Patents All Time

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
7049611 Charged-particle beam lithographic system 2006-05-23
5141830 Charged-particle beam lithography method 1992-08-25
5142154 Charged-particle beam lithography and cassette for material patterned by charged-particle beam lithographic apparatus 1992-08-25
4380885 Hoop toy 1983-04-26