Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076642 | Electron beam apparatus and method of operating the same | — | 2011-12-13 |
| 7161149 | Scanning electron microscope and method of controlling same | — | 2007-01-09 |
| 6852983 | Charged-particle beam apparatus equipped with aberration corrector | Miyuki Matsuya | 2005-02-08 |
| 6710340 | Scanning electron microscope and method of detecting electrons therein | — | 2004-03-23 |
| 6653632 | Scanning-type instrument utilizing charged-particle beam and method of controlling same | — | 2003-11-25 |
| 6600156 | Scanning electron microscope | — | 2003-07-29 |