Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11402648 | Method and device for coupling out a partial beam having a very small beam percentage from an optical beam | Stephan Fahr, Torsten Erbe | 2022-08-02 |
| 9971149 | Method for producing a wavefront-corrected optical arrangement comprising at least two optical elements | Jan Werschnik | 2018-05-15 |
| 9110380 | Exposure device for the structured exposure of a surface | Jan Werschnik, Lutz Reichmann | 2015-08-18 |