Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7544952 | Multivalent ion generating source and charged particle beam apparatus using such ion generating source | Makoto Sakurai, Fumiharu Nakajima, Nobuyuki Nakamura, Shunsuke Ohtani, Shinro Mashiko | 2009-06-09 |