Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11566665 | Apparatus, system and method for an air bearing stage for component or devices | Jeroen Bosboom, Babak Naderi, Payman Rahimi, Michael McKenney, George Kovatchev +3 more | 2023-01-31 |
| 11286984 | Apparatus, system and method for an air bearing stage for component or devices | Jeroen Bosboom, Babak Naderi, Payman Rahimi, Michael McKenney, George Kovatchev +3 more | 2022-03-29 |
| 10553472 | Apparatus, system and method for providing a bernoulli-based semiconductor wafer pre-aligner | Jeroen Bosboom, Babak Naderi, George Kovatchev, Payman Rahimi | 2020-02-04 |