Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137693 | Pellicle holder, pellicle inspection apparatus, and pellicle inspection method | Jin Ho Ahn, Young Woong Kim | 2021-10-05 |
| 10962876 | EUV pellicle structure and method for manufacturing same | Jin Ho Ahn, Jung-Hwan Kim, Jung Sik Kim, Yong Ju JANG | 2021-03-30 |