Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428581 | Chemical mechanical polishing slurry composition for polishing boron silicon compound, chemical mechanical polishing method and method of fabricating semiconductor device using the same | Hyun Goo KANG, Jong-Young Cho, Ungyu PAIK, Taeseup SONG, Dong-Hyeok Kim | 2025-09-30 |
| 12122702 | Ultrapure water supply apparatus, substrate processing system including the same, and substrate processing method using the same | Jongha YUN, Seyoon KIM, Juhui PARK, Jiyeon Lee | 2024-10-22 |