Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5348617 | Selective etching process | — | 1994-09-20 |
| 5232571 | Aluminum nitride deposition using an AlN/Al sputter cycle technique | — | 1993-08-03 |
| 5075641 | High frequency oscillator comprising cointegrated thin film resonator and active device | Robert J. Weber, Stanley G. Burns | 1991-12-24 |