Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12217949 | Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films | — | 2025-02-04 |
| 12077849 | Electrically and magnetically enhanced ionized physical vapor deposition unbalanced sputtering source | Roman Chistyakov | 2024-09-03 |
| 11823859 | Sputtering a layer on a substrate using a high-energy density plasma magnetron | — | 2023-11-21 |
| 11821068 | Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films | Roman Chistyakov | 2023-11-21 |
| 11482404 | Electrically and magnetically enhanced ionized physical vapor deposition unbalanced sputtering source | Roman Chistyakov | 2022-10-25 |
| 11359274 | Electrically and magnetically enhanced ionized physical vapor deposition unbalanced sputtering source | Roman Chistyakov | 2022-06-14 |
| 11306391 | Magnetically enhanced low temperature-high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films | Roman Chistyakov | 2022-04-19 |
| 11286555 | Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films | Roman Chistyakov | 2022-03-29 |
| 11255012 | Electrically and magnetically enhanced ionized physical vapor deposition unbalanced sputtering source | Roman Chistyakov | 2022-02-22 |
| 10957519 | Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films | Roman Chistyakov | 2021-03-23 |
| 10913998 | Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films | Roman Chistyakov | 2021-02-09 |
| 10900118 | Magnetically enhanced low temperature-high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond like films | Roman Chistyakov | 2021-01-26 |
| 10480063 | Capacitive coupled plasma source for sputtering and resputtering | Roman Chistyakov | 2019-11-19 |
| 10227692 | Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films | Roman Chistyakov | 2019-03-12 |
| 10227691 | Magnetically enhanced low temperature-high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond like films | Roman Chistyakov | 2019-03-12 |
| 9951414 | Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films | Roman Chistyakov | 2018-04-24 |
| 9771648 | Method of ionized physical vapor desposition sputter coating high aspect-ratio structures | Roman Chistyakov | 2017-09-26 |
| 9123508 | Apparatus and method for sputtering hard coatings | Roman Chistyakov | 2015-09-01 |
| 7898183 | Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities | Roman Chistyakov | 2011-03-01 |
| 7663319 | Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities | Roman Chistyakov | 2010-02-16 |