Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266692 | Device for improving the mobility of carriers in a MOSFET channel on silicon carbide | Laurent Roux, Philippe Godignon | 2025-04-01 |
| 11053582 | Support including an electrostatic substrate carrier | Laurent Roux | 2021-07-06 |
| 10923325 | Method of controlling an implanter operating in plasma immersion | Laurent Roux | 2021-02-16 |
| 9922856 | Electrostatic heating substrate holder which is polarised at high voltage | Laurent Roux | 2018-03-20 |
| 9552962 | Method of controlling an ion implanter in plasma immersion mode | Laurent Roux | 2017-01-24 |
| 9534287 | Machine for implanting ions in plasma immersion mode for a low-pressure method | Laurent Roux | 2017-01-03 |
| 9524853 | Ion implantation machine presenting increased productivity | Laurent Roux | 2016-12-20 |
| 9520274 | Ion implanter provided with a plurality of plasma source bodies | Laurent Roux | 2016-12-13 |
| 9035269 | Control module for an ion implanter | Laurent Roux | 2015-05-19 |
| 8895945 | Dose measurement device for plasma-immersion ion implantation | Laurent Roux | 2014-11-25 |