Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5269643 | Method and apparatus for transferring wafers from wafer carrier to wafer conveyor apparatus in carrierless wafer surface treatment apparatus | Shunsaku Kodama, Shigeru Kohara, Yasuhiko Ohashi | 1993-12-14 |