Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5998282 | Method of reducing charging damage to integrated circuits in ion implant and plasma-based integrated circuit process equipment | — | 1999-12-07 |
| 5594328 | Passive probe employing cluster of charge monitors for determining simultaneous charging characteristics of wafer environment inside IC process equipment | — | 1997-01-14 |
| 5315145 | Charge monitoring device for use in semiconductor wafer fabrication for unipolar operation and charge monitoring | — | 1994-05-24 |