Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9109283 | Structure of reaction chamber of semiconductor sputtering equipment | Tsung-Chih Chou, Shyue-Jer Chern | 2015-08-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9109283 | Structure of reaction chamber of semiconductor sputtering equipment | Tsung-Chih Chou, Shyue-Jer Chern | 2015-08-18 |