Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6665575 | Recipe editor for editing and creating process recipes with parameter-level security for various kinds of semiconductor-manufacturing equipment | Manoj Betawar, Dinesh Goradia, Manish C. Mehta, Nitin S. Parekh | 2003-12-16 |
| 6415193 | Recipe editor for editing and creating process recipes with parameter-level semiconductor-manufacturing equipment | Manoj Betawar, Dinesh Goradia, Manish C. Mehta, Nitin S. Parekh | 2002-07-02 |