Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12030779 | Method for producing carbon- or graphite-foam parts | David Klein, Michael GERADS | 2024-07-09 |
| 11873559 | Plasma boat for receiving wafers with regulated plasma deposition | — | 2024-01-16 |
| 10151030 | Protective layer for PECVD graphite boats | — | 2018-12-11 |
| 10094016 | Modular tubular susceptor | Meinhard Wisskirchen, Steffen Still | 2018-10-09 |
| 9228256 | Substrate support | — | 2016-01-05 |
| 8747981 | Form and force locking connection of special graphite parts to form multi-part graphite components | — | 2014-06-10 |