Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5749160 | Multi-zone method for controlling voc and nox emissions in a flatline conveyor wafer drying system | Jeffrey L. Dexter, David C. Siemers, Larry J. Head, Donald E. Miller, William C. Nowack +1 more | 1998-05-12 |