Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10006146 | Cluster apparatus for treating substrate | Yong-Sung Park, Dong Yeul Kim, Ki Hoon Kim | 2018-06-26 |
| 9567673 | Substrate susceptor and deposition apparatus having same | Yong-Sung Park, Dong Yeul Kim | 2017-02-14 |
| 8793078 | Method for predicting activation energy using atomic fingerprint descriptor or atomic descriptor | Ky Youb Nam, Kyoung Tai No, Doo Nam Kim, Won Seok Oh, Ji-Hoon Jung +2 more | 2014-07-29 |