Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5039376 | Method and apparatus for the plasma etching, substrate cleaning, or deposition of materials by D.C. glow discharge | Stefan Zukotynski, Franco Gaspari, Clement I. Ukah | 1991-08-13 |