Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6533867 | Surface sealing showerhead for vapor deposition reactor having integrated flow diverters | — | 2003-03-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6533867 | Surface sealing showerhead for vapor deposition reactor having integrated flow diverters | — | 2003-03-18 |