Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7168607 | Method and device for cleaning and then bonding substrates | Hans-Ulrich Ehrke, Markus Gabriel | 2007-01-30 |
| 6891602 | Device for aligning masks in photolithography | Nikolaus Maier, Ralf Suss | 2005-05-10 |