PS

Paul A. Swanson

Overall (All Time): #872,055 of 4,157,543Top 25%
6
Patents All Time

Issued Patents All Time

Showing 1–6 of 6 patents

Patent #TitleCo-InventorsDate
7364145 High stiffness flexure Jeffrey Knirck 2008-04-29
6931938 Measuring pressure exerted by a rigid surface Jeffrey Knirck 2005-08-23
6885116 Moving coil linear motor positioning stage with a concentric aperture Jeffrey Knirck 2005-04-26
6031597 Method and apparatus for transfer of a reticle pattern onto a substrate by scanning Jeffrey Knirck 2000-02-29
5883703 Methods and apparatus for detecting and compensating for focus errors in a photolithography tool Jeffrey Knirck, John Gibson 1999-03-16
5298939 Method and apparatus for transfer of a reticle pattern onto a substrate by scanning John Gibson, Jeffrey Knirck 1994-03-29