Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8101458 | Method of forming monolithic CMOS-MEMS hybrid integrated, packaged structures | G. Krishna Kumar, Joseph M. Chalil | 2012-01-24 |
| 8101469 | Method of forming monolithic CMOS-MEMS hybrid integrated, packaged structures | G. Krishna Kumar, Joseph M. Chalil | 2012-01-24 |
| 7989248 | Method of forming monolithic CMOS-MEMS hybrid integrated, packaged structures | G. Krishna Kumar, Joseph M. Chalil | 2011-08-02 |