Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4278528 | Rectilinear sputtering apparatus and method | Manfred R. Kuehnle, Arno K. Hagenlocher | 1981-07-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4278528 | Rectilinear sputtering apparatus and method | Manfred R. Kuehnle, Arno K. Hagenlocher | 1981-07-14 |