Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087572 | Etch stop layer | Bart J. van Schravendijk, Soumana Hamma, Kai-Lin Ou, Malay Milan Samantaray | 2024-09-10 |
| 12014921 | Plasma enhanced wafer soak for thin film deposition | Arul N. Dhas, Tu Hong | 2024-06-18 |
| 9637821 | Method for supplying vaporized precursor | Damien Slevin, Brad Laird, Curtis Bailey, Sirish Reddy, James Sims +2 more | 2017-05-02 |
| 9328416 | Method for the reduction of defectivity in vapor deposited films | Arul N. Dhas, Akhil Singhal, Kareem Boumatar | 2016-05-03 |
| 9297394 | Metal sheets and plates having friction-reducing textured surfaces and methods of manufacturing same | James M. Marinelli, Jiantao Liu, Paul E. Magnusen, Simon Sheu, Markus B. Heinimann +2 more | 2016-03-29 |
| 9230800 | Plasma activated conformal film deposition | Adrien LaVoie, Shankar Swaminathan, Hu Kang, Ramesh Chandrasekharan, Tom Dorsh +9 more | 2016-01-05 |
| 9064693 | Deposition of thin film dielectrics and light emitting nano-layer structures | Jean-Paul Noel | 2015-06-23 |
| 9034142 | Temperature controlled showerhead for high temperature operations | Christopher M. Bartlett, Jon Henri, Marshall R. Stowell, Mohammed Sabri | 2015-05-19 |
| 8728956 | Plasma activated conformal film deposition | Adrien LaVoie, Shankar Swaminathan, Hu Kang, Ramesh Chandrasekharan, Tom Dorsh +9 more | 2014-05-20 |
| 8628618 | Precursor vapor generation and delivery system with filters and filter monitoring system | Damien Slevin, Brad Laird, Curtis Bailey, Sirish Reddy, James Sims +2 more | 2014-01-14 |
| 8578747 | Metal sheets and plates having friction-reducing textured surfaces and methods of manufacturing same | James M. Marinelli, Jiantao Liu, Paul E. Magnusen, Simon Sheu, Markus B. Heinimann +2 more | 2013-11-12 |
| 8524612 | Plasma-activated deposition of conformal films | Hu Kang, Mandyam Sriram, Adrien LaVoie | 2013-09-03 |
| 8444092 | Metal sheets and plates having friction-reducing textured surfaces and methods of manufacturing same | James M. Marinelli, Jiantao Liu, Paul E. Magnusen, Simon Sheu, Markus B. Heinimann +2 more | 2013-05-21 |
| 8101531 | Plasma-activated deposition of conformal films | Hu Kang, Mandyam Sriram, Adrien LaVoie | 2012-01-24 |
| 8017527 | Method and apparatus to reduce defects in liquid based PECVD films | Arul N. Dhas, Joseph Bradley Laird | 2011-09-13 |
| 8003549 | Methods of forming moisture barrier for low K film integration with anti-reflective layers | Bart J. van Schravendijk, Tom Mountsier, Chiu Chi, Kevin J. Ilcisin, Julian J. Hsieh | 2011-08-23 |
| 7642202 | Methods of forming moisture barrier for low k film integration with anti-reflective layers | Bart J. van Schravendijk, Tom Mountsier, Chiu Chi, Kevin J. Ilcisin, Julian J. Hsieh | 2010-01-05 |
| 7455004 | Apparatus and method for cutting sheet material | Hongbing Lu, James M. Rushing, Dennis P. Henninger, Xingyun Shen | 2008-11-25 |
| 7430951 | Method and apparatus for trimming aluminum sheet to reduce slivers and improve edge quality | Gregory Fata | 2008-10-07 |
| 7052988 | Applications and methods of making nitrogen-free anti-reflective layers for semiconductor processing | Bart J. van Schravendijk, Jason Tian, Tom Mountsier, M. Ziaul Karim | 2006-05-30 |
| 6992388 | Formation of micro rough polysurface for low sheet resistant salicided sub-quarter micron polylines | — | 2006-01-31 |
| 6976414 | Method and apparatus for trimming aluminum sheet | Gregory Fata | 2005-12-20 |
| 6720251 | Applications and methods of making nitrogen-free anti-reflective layers for semiconductor processing | Bart J. van Schravendijk, Jason Tian, Tom Mountsier, M. Zlaul Karim | 2004-04-13 |
| 5960311 | Method for forming controlled voids in interlevel dielectric | Abha Singh, Artur P. Balasinski | 1999-09-28 |
| 5847464 | Method for forming controlled voids in interlevel dielectric | Abha Singh, Artur P. Balasinski | 1998-12-08 |