| 6459492 |
Non-contact position sensor |
— |
2002-10-01 |
| 6413702 |
Method for making a holographic linear position encoder |
— |
2002-07-02 |
| 5982494 |
Non-contact position sensor |
— |
1999-11-09 |
| 5886787 |
Displacement sensor and method for producing target feature thereof |
— |
1999-03-23 |
| 5835224 |
Non-contact position sensor |
— |
1998-11-10 |
| 5812266 |
Non-contact position sensor |
— |
1998-09-22 |
| 5530543 |
Detector array for use in interferometric metrology systems |
— |
1996-06-25 |
| 5098190 |
Meterology using interferometric measurement technology for measuring scale displacement with three output signals |
Geert Wijntjes |
1992-03-24 |
| 4872751 |
Non-contact lateral displacement sensor and extensometer system |
— |
1989-10-10 |
| 4823348 |
Laser stabilization device |
— |
1989-04-18 |
| 4711573 |
Dynamic mirror alignment control |
Geert Wijntjes |
1987-12-08 |
| 4672618 |
Laser stabilization servo system |
Geert Wijntjes |
1987-06-09 |
| 4655587 |
Mirror scan velocity control |
Geert Wijntjes |
1987-04-07 |