Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5989947 | Method for the manufacture of quantum structures, in particular quantum dots and tunnel barriers as well as components with such quantum structures | Markus Dilger, Karl Eberl, Rolf Haug | 1999-11-23 |