Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6042652 | Atomic layer deposition apparatus for depositing atomic layer on multiple substrates | Kyung-Ho Park, Neung-goo Yoon, Kang-jun Choi, Soo-hong Jeong | 2000-03-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6042652 | Atomic layer deposition apparatus for depositing atomic layer on multiple substrates | Kyung-Ho Park, Neung-goo Yoon, Kang-jun Choi, Soo-hong Jeong | 2000-03-28 |