Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5853521 | Multi-cathode electron beam plasma etcher | Kie Hyung Chung, Sang-Young Kim, Tae-Young Kim | 1998-12-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5853521 | Multi-cathode electron beam plasma etcher | Kie Hyung Chung, Sang-Young Kim, Tae-Young Kim | 1998-12-29 |