Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380567 | Wafer purging-type shelf assembly and buffer module having the same | Jae Won Jang | 2022-07-05 |
| 10796937 | Equipment front end module | Jae Won Jang | 2020-10-06 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380567 | Wafer purging-type shelf assembly and buffer module having the same | Jae Won Jang | 2022-07-05 |
| 10796937 | Equipment front end module | Jae Won Jang | 2020-10-06 |