Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6306216 | Apparatus for deposition of thin films on wafers through atomic layer epitaxial process | Yong II KIM, Yeo-Heung Yun | 2001-10-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6306216 | Apparatus for deposition of thin films on wafers through atomic layer epitaxial process | Yong II KIM, Yeo-Heung Yun | 2001-10-23 |