Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12018374 | System and method of low temperature thin film deposition and in-situ annealing | — | 2024-06-25 |
| 11924952 | Microwave assisted parallel plate e-field applicator | — | 2024-03-05 |
| 10667340 | Microwave assisted parallel plate E-field applicator | — | 2020-05-26 |
| 7928021 | System for and method of microwave annealing semiconductor material | Jeffrey M. Kowalski | 2011-04-19 |
| 6101844 | Double wall reaction chamber glassware | Jack Fowler, Robert Parvin, Patrick W. Wiesen | 2000-08-15 |