Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372469 | Defect classification equipment for silicon carbide substrate using single incident light-based photoluminescence and defect classification method using the same | Min-Jung Lee | 2025-07-29 |
| 11009461 | Defect investigation device simultaneously detecting photoluminescence and scattered light | Youngbeom Kim | 2021-05-18 |